Course Introduction(Undergraduate Program):Introduction to Micro-electromechanical System（415313）

Source: This web site Publish date: 2015-10-28 10:25:00

This course is an elective for Mechanical Engineering students with strong professional and novelty. This course will lay the foundation for training of talents in this field. The purpose of this course is to help students understand the micro-electromechanical systems (MEMS), guide and cultivate students’ interests in this field, to enable students to master the basic theory of micro-electromechanical systems, and to provide students with introductory guide.

The course content is divided into six chapters. It introduces the working principle and characteristics of MEMS, materials and processing technology used to fabricate MEMS, the applications and advantages, as well as MEMS development trend.